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Reverse current reduction of Ge photodiodes on Si without post growth annealing

上传者: 2021-03-15 19:57:54上传 PDF文件 612.93KB 热度 11次
A new approach to reduce the reverse current of Ge pin photodiodes on Si is presented, in which an i-Si layer is inserted between Ge and top Si layers to reduce the electric field in the Ge layer. Without post-growth annealing, the reverse current density is reduced to ~10 mA/cm2 at -1 V, i.e., over
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