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Structure and features of SnO2 thin films prepared by RF reactive sputtering

上传者: 2021-02-23 03:26:26上传 PDF文件 710.75KB 热度 17次
SnO2 thin films with good orientation are prepared on a glass substrate by radio frequence (RF) reactive sputtering. The phases of the thin films before and after annealing are analyzed by X-ray diffraction (XRD) spectroscopy, and the surface morphologies of the thin films before and after annealing
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