基于SOPC技术的激光直写数字伺服控制器

AlteraNiosII嵌入式处理器设计大赛2007获奖作品LaserDirectWritingDigitalServoControllerBasedonSOPCTechnologySecondPrizeLaserDirectWritingDigitalServoControllerBasedonSOPCTechnologyInstitution:Ultra-PrecisionPhotoelectricInstrumentEngineeringResearchInstitute,HarbinInstituteofTechnologyParticipants:LeiYan,TaoCheng,YaGaoInstructor:WangLeiDesignIntroductionTheapplicationofprecision/ultra-precisionprocessingtechnologyhasexpandedfromafewareas(suchasnationaldefenseandaerospace)todifferentaspectsofthenationaleconomy.Asthesemiconductorindustrydevelops,itimposesincreasingrequirementsonlaserdirectwritinglithography,whichisthecoreofvery-large-scaleintegration(VLSI)ma