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Dislocation blocking by AlGaN hot electron injecting layer in the epitaxial grow

上传者: 2021-02-21 14:46:40上传 PDF文件 1.26MB 热度 8次
This paper reports an efficient method to improve the crystal quality of GaN Gunn diode withAlGaN hot electron injecting layer (HEI). An evident reduction of screw dislocation and edgedislocation densities is achieved by the strain management and the enhanced lateral growth in hightemper
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