Influences of working power on properties for boron films deposited by RF magnet

Name: Influences of working power on properties for boron films deposited by RF magnet
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Author: liuyongbo19818

上传者：liuyongbo19818 2020-07-18 05:25:58上传 PDF文件 516.97KB 热度 48次

溅射功率对磁控溅射法硼膜性能的影响，杨溢铭，黄健，由于硼、富硼薄膜所具有的独特性质，比如高熔点（约2500K）、低密度、高硬度、好的热电特性及中子屏蔽特性等，近年来受到大家的广�

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Influences of working power on properties for boron films deposited by RF magnet

溅射功率对磁控溅射法硼膜性能的影响，杨溢铭，黄健，由于硼、富硼薄膜所具有的独特性质，比如高熔点（约2...

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