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56 Gbps high speed Ge electro absorption modulator

上传者: 2021-02-22 20:19:05上传 PDF文件 1MB 热度 20次
A high-speed evanescent-coupled Ge waveguide electro-absorption modulator (EAM) with simple fabrication processes was realized on a silicon-on-insulator platform with a 220 nm top Si layer. Selectively grown Ge with a triangle shape was directly used for Ge waveguides of the EAM. An asymmetric p-i-n
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