Lowtemperature growth of highly coriented GaN films on Ag substrates with ECRPEM

Name: Lowtemperature growth of highly coriented GaN films on Ag substrates with ECRPEM
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Author: seeyee

上传者：seeyee 2020-03-31 20:37:46上传 PDF文件 1.78MB 热度 38次

银衬底上低温沉积GaN薄膜及其性能研究，王帅，秦福文，本文通过利用电子回旋共振-等离子体增强金属有机物化学气相沉积(ECR-PEMOCVD)技术，在在镀银硅片衬底上低温沉积高择优取向的GaN。实验�

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Lowtemperature growth of highly coriented GaN films on Ag substrates with ECRPEM

银衬底上低温沉积GaN薄膜及其性能研究，王帅，秦福文，本文通过利用电子回旋共振-等离子体增强金属有机...

大小：0B | 2020-03-31 20:37:46
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