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Study on the material remove mechanism of SiC surface polishing

上传者: 2021-04-27 19:32:04上传 PDF文件 122.6KB 热度 14次
As aerospace technology develops rapidly, higher demand for aerospace optic system is brought forward. With its excellent physical qualities, SiC becomes a very promising material for speculums. The material-remove mechanism of SiC surface polishing is studied, that is, the grinding mechanism of cer
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