Method to improve the ef fect of surface modif ication of RB SiC mirror by SiC c

SiC coating for surface modification grows on reaction boned SiC (RB-SiC) substrate cannot have high quality because the material of RB-SiC has two phases. We apply a new method to improve the effect of surface modification. First the surface of RB-SiC is carbonized, and then a diamond like carbon (