Investigation of optical emission spectroscopy in diamond chemical vapor deposit

The optical emission spectra (atomic hydrogen (H'alpha', H'beta', H'gamma', atomic carbon C (2p3s->2p2: 'lambda'=165.7 nm) and radical CH (A2'Delta'->X2'pi':'lambda'=420-440 nm)) in the gas phase process of the diamond film growth from a gas mixture of CH[EQUATION] and H[EQUATION] by the techn