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Study of the substructure in nanometer copper thin films treated by laser shock

上传者: 2021-04-17 21:21:53上传 PDF文件 187.24KB 热度 8次
We study nanometer copper thin films prepared by magnetron sputtering and treated with laser shock processing (LSP). We observe the formation of firstborn twin crystals and some complete twin crystals in the copper thin films. After LSP, scanning electron microscope (SEM) images show obvious plastic deformation of the copper grain on the film surface, dramatically increased grain size, and the appearance of a large number of twin crystals. Moreover, the width of the crystals is a few dozen nanom
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