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Study on eight pass dual frequency laser interferometer with nanometer precision

上传者: 2021-02-25 06:30:38上传 PDF文件 290.9KB 热度 19次
A new dual-frequency laser displacement measurement interferometer with nanometer precision has been developed. An eight-pass optical subdivision technology is proposed to improve resolution based on commercial interferometers. A static positioning error measuring method has been used to examine the
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