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Annealing induced refinement on optical transmission and electrical resistivity

上传者: 2021-03-25 21:19:09上传 PDF文件 1.39MB 热度 16次
The effect of annealing condition on sputtered indium tin oxide (ITO) films on quartz with the thickness of 200 nm is characterized to show enhanced optical transparency and optimized electrical contact resistivity. The as-deposited grown ITO film exhibits only 65% and 80% transmittance at 532 and 6
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