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Nanostructure and thermal optical properties of vanadium dioxide thin films

上传者: 2021-03-23 17:09:05上传 PDF文件 318.74KB 热度 28次
A novel nanopolycrystalline structure of vanadium dioxide thin films is deposited on silicon or fused silica substrates by reactive ion sputtering and followed by an annealing. The characteristic analysis shows that the films have a columnar nanostructure with an average grain of 8 nm. The resistivi
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