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Spatial phase shifting interferometry with compensation of geometric errors base

上传者: 2021-03-09 05:53:50上传 PDF文件 4.27MB 热度 25次
We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. How
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