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Study on an improved five interferogram phase shifting algorithm

上传者: 2021-04-23 22:41:37上传 PDF文件 564.91KB 热度 22次
Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to \pi/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional five-interferogram algorithm, but also does not need absolute equal step to unwrap phas
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