Formation of Au Al alloy on silicon for polymer modulator electrode application

The formation of aurum-aluminum (Au-Al) alloy on silicon substrate and its use to be electrode of polymer electro-optic (EO) modulator were investigated. The surface morphology and crystallinity were studied by atomic force microscopy, scanning electron microscope, X-ray diffractometer (XRD) and energy dispersive spectrometer. The electrical resistivity was characterized by the four-probe method. XRD pattern confirmed the formation of AuAl phase. After annealed for 11 min at 575 degrees C, the A