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A Highly Sensitive Optical Sensor Design by Integrating a Circular Hole Defect W

上传者: 2021-03-01 05:21:32上传 PDF文件 1.22MB 热度 23次
We present a sensitive optical sensor design by integrating a circular-hole defect with an etched diffraction grating (EDG) spectrometer based on amorphous-silicon photonic platforms. The circular-hole defect obtained from the outdiffusion of the hydrogen in the annealing process can induce strong r
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