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Tensile strained Ge/SiGe multiple quantum well microdisks

上传者: 2021-02-24 18:19:25上传 PDF文件 1.86MB 热度 10次
An efficient monolithically integrated laser on Si remains the missing component to enable Si photonics. We discuss the design and fabrication of suspended and tensile-strained Ge/SiGe multiple quantum well microdisk resonators on Si for laser applications in Si photonics using an all-around SiNx st
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