Design of Pd/B4C aperiodic multilayers for 8–12 nm region with flat reflectivity

The Pd/B4C multilayer is a promising candidate for high reflectance mirrors operating in the 8–12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd/B4C multilayers. We discuss the influence of the desired refle