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位移扫描压电陶瓷动态线性的测量

上传者: 2021-02-09 18:02:55上传 PDF文件 1.16MB 热度 14次
The displacement linearity of scanning piezoelectric ceramics can be measured by scanning interference method with a He-Ne laser and a high voltage ramp generator. The results of two typical piezoelectric ceramics are given.
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