Smart sensors and MEMS 2014
©WoodheadPublishingLimited,2014
Thebookcoversacollectionofkeytopicsinthefieldofsensorsand
micro-electro-mechanicalstructures(MEMS).Despitethenumerous
effortsinthelastfewdecadestoputorderintheterminologyanddefi-
nitionsinthefieldofsensors,stillthereisco
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