MEMS motion sensors.ppt

Inertialsensingmeasuresacceleration,tilt,shock,vibration,androtationetc.Inertialsensorsconsistofaccelerometers,gyroscopes,compasses,andtheirintegration. MEMS(Micro-Electro-MechanicalSystems)isawholesystemwhichincludesmechanicalelements,micro-sensors,signalprocessing,