论文研究Diamondlike carbon deposition using microwave plasma chemical vapor depositi

Diamond-likecarbondepositionusingmicrowaveplasmachemicalvapordeposition，赖秀琼，陈俊芳，Thespatialplasmadensitydistributioninthereactionchamberofthequartztubemicrowaveplasmaapparatusisdiagnosedatp=1.20kpa,Pw=440WbyaLangmuirprobe,obtaining