VLSI Fabrication Principles, Silicon and Gallium Arsenide
超大规模集成电路制造技术，同志们，超好的一本当代用书！Summary:Fullyupdatedwiththelatesttechnologies,thiseditioncoversthefundamentalprinciplesunderlyingfabricationprocessesforsemiconductordevicesalongwithintegratedcircuitsmadefromsiliconandgalliumarsenide.StressesfabricationcriteriaforsuchcircuitsasCMOS,bipolar,MOS,FE
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这本书偏向原理多一些
下载了还没看，清晰度还可以