1. 首页
  2. 数据库
  3. 其它
  4. Laser induced damage threshold testing of DUV optical substrates

Laser induced damage threshold testing of DUV optical substrates

上传者: 2021-04-27 14:34:53上传 PDF文件 405.96KB 热度 36次
Laser induced damage threshold (LIDT) testing is the effective methods to research the lifetime of optical elements. According to ISO 11254 standards, a LIDT testing system of ArF excimer laser is established. The laser beam size on the sample surface can be varied from 0.3 to 0.6 mm in diameter. Th
下载地址
用户评论