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Position sensor based on slit imaging

上传者: 2021-04-24 22:25:47上传 PDF文件 288.33KB 热度 22次
A position sensor based on slit imaging is proposed and its measurement principle is described. An imaging slit is illuminated by a collimated laser beam with square-wave modulation and imaged on a detection double slit through a 4f system. A magnified image of the detection double slit is formed on
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