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Double sinusoidal phase modulating laser diode interferometer for thickness meas

上传者: 2021-04-21 19:52:11上传 PDF文件 389KB 热度 27次
A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can
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