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Characterization of multilayers and their interlayers: applicationto Co based sy

上传者: 2021-04-20 03:53:20上传 PDF文件 810.53KB 热度 20次
We use complementary analysis techniques to determine the structure of nanometric periodic multilayers and particularly their interfaces. We focus on Co-based multilayer which can be used as efficient optical component in the extreme ultraviolet (EUV) range. The samples are characterized using reflectivity measurements in order to determine the thickness and roughness of the various layers, X-ray emission and nuclear magnetic resonance (NMR) spectroscopies to identify the chemical state of the a
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