A Sensitive Probe Technique to Measure the Rate of Neutral Free Radical Producti

We report a sensitive measurement method to determine the rate of neutral free radical production by photo-deionization of negative ion beams (PDINIB), which is an experimental approach to supply a constant-flux refined beam of neutral free radicals (RBNR) onto a well-defined material surface. The method of photoelectron-current measurement by low-frequency electro-modulation probe (PMMP) was employed to estimate the production rate in a trial surface-processing apparatus utilizing RBNR produced