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Aspheric surface measurement based on sub aperture stitching interferometry

上传者: 2021-03-27 05:09:52上传 PDF文件 943.32KB 热度 19次
In order to test convex aspheric surfaces without the aid of other null optics, a novel method combined sub-aperture stitching and interferometry called SSI (sub-aperture stitching interferometry) is introduced. In this letter, the theory, basic principle, and flow chart of SSI are researched. A syn
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