Sixth harmonic generation of 1064 nm laser in KBBF prism coupling devices under

The conversion efficiency on the sixth harmonic of 1064 nm in KBe2BO3F2 (KBBF) at different gas pressures in two kinds of gases, helium and nitrogen, is measured and compared. In the both gases, maximum conversion efficiency on the sixth harmonic of 1064 nm in high vacuum is nearly 10% of 355 nm, which is almost four times higher than that in low vacuum. The maximum average output power at 177.3 nm is 670 \muW with the repetition rate of 10 Hz and the duration of 20 ps in high vacuum. It indicat