1. 首页
  2. 数据库
  3. 其它
  4. A lateral field excited ZnO film bulk acoustic wave sensor working in viscous en

A lateral field excited ZnO film bulk acoustic wave sensor working in viscous en

上传者: 2021-02-24 04:51:10上传 PDF文件 1.03MB 热度 14次
We present a lateral field excited ZnO film bulk acoustic resonator (FBAR) operated in pure-shear mode and analyze its performances in viscous liquids. The electrodes of the device are located on the film surface and normal to the c-axis of the ZnO film. The proposed device works near 1.44 GHz with
下载地址
用户评论