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Short wave infrared detector with double barrier structure and low dark current

上传者: 2021-02-23 17:10:51上传 PDF文件 608.62KB 热度 16次
Short-wave infrared (SWIR) detectors combining AlAs/In0.53Ga0.47As/AlAs double barrier structure (DBS) with In0.53Ga0.47As absorption layer are fabricated by molecular beam epitaxy. By adding a p-charge layer, the dark current density of the detector is lowered by 3 orders of magnitude. The responsi
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