A novel MEMS electromagnetic actuator with large displacement

Name: A novel MEMS electromagnetic actuator with large displacement
Rating: 4.5 (33 reviews)
Author: hanzhitang

上传者：hanzhitang 2021-02-23 03:32:56上传 PDF文件 2.1MB 热度 33次

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A novel MEMS electromagnetic actuator with large displacement

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