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In situ optical monitor system for CIGS solar cell applications

上传者: 2021-02-23 03:03:03上传 PDF文件 339.38KB 热度 25次
An in situ process monitor for the CuInxGa1?xSe2 (copper indium gallium selenide) (CIGS) coating system is a very important tool that produces repeatable, high-quality CIGS coatings. This letter provides an overview of the current state of application of in situ process monitor systems for co-evapor
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