Performance Improved by Incorporating of Ru Atoms into Zr Si Diffusion Barrier f

Name: Performance Improved by Incorporating of Ru Atoms into Zr Si Diffusion Barrier f
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Author: weixin_61010

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Performance Improved by Incorporating of Ru Atoms into Zr-Si Diffusion Barrier for Cu Metallization

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Performance Improved by Incorporating of Ru Atoms into Zr Si Diffusion Barrier f

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