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Excimer Laser Induced Volcano Pattern on Si Surface

上传者: 2021-02-22 22:56:18上传 PDF文件 1.63MB 热度 21次
A new Volcano pattern which has five different zones: hole, regular periodic ridges, fractals, microcolums, and fringes grows on silicon (100) surface by 308 nm excimer laser irradiation. The volcano pattern is disappeared under 1.5 J/cm2, and the period of the regular ridges relates to laser pulse
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