Ultracompact Multilayer Fabry–Perot Filter Deposited in a Micropit

We fabricate amultilayer Fabry–Perot filter (FPF) on a GaN-on-silicon platform. Being significantly different from conventional thin film FPFs formed on smooth flat surfaces, this FPF is deposited in a micropit, and takes a suspended GaN membrane as its carrier, which makes the whole structure ultracomp