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Fabrication of high Q polymer microring resonators

上传者: 2021-02-20 19:35:29上传 PDF文件 531.47KB 热度 30次
A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining waveguides. The PSQ-L polymer film shows good optical properties and high thermal stability. The all polymer microring resonator is fabricated by conventional lithography and ICP etching process. About 3-
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