EUV ablation of organic polymers at a high fluence

A preliminary investigation on short-wavelength ablation mechanisms of poly(methyl methacrylate) (PMMA) and poly (1,4-phenylene ether ether-sulfone) (PPEES) by extreme ultraviolet (EUV) radiation at 13.5 nm using a table-top laserproduced plasma from a gas-puff target at LLG (Gottingen) and at 46.9