13.5 nm Schwarzschild microscope with high magnification and high resolution

A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100 μm field of view (FOV) is designed and is working at 13.5 nm. Meanwhile, a CCD is used as a detector with a pixel size of 13 μm×13 μm and imaging area of 13 mm×13 mm. The imaging quality with tolerances o