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Broadband mid IR antireflective Reuleaux triangle shaped hole array on germanium

上传者: 2021-02-01 11:01:54上传 PDF文件 507.13KB 热度 11次
A gradient-index Reuleaux-triangle-shaped hole array was fabricated on germanium (Ge) by nanoimprint lithography and inductively coupled plasma processing as a broadband mid-infrared (IR) antireflective surface. The interaction between the {111} planes of cubic crystalline Ge and a circular mold suc
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