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Manufacturing of precision optical coatings

上传者: 2021-02-01 06:30:58上传 PDF文件 1.71MB 热度 14次
Thin film optical coatings tailor light reflected or transmitted from an optical element in a desired way. An optical coating chamber is a complex system in which multiple subsystems operate together to fabricate such coatings. For physical vapor deposition processes, such as evaporation and sputter
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