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Angle deviation optical profilometer

上传者: 2021-01-31 21:33:10上传 PDF文件 569KB 热度 22次
We propose a new optical profilometer for three-dimensional (3D) surface profile measurement in real time. The deviation angle is based on geometrical optics and is proportional to the apex angle of a test plate. Measuring the reflectivity of a parallelogram prism allows detection of the deviation a
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