Analysis of TM/TE mode enhancement and droop reduction by a nanoporous n AlGaN u

A full structure 290-nm ultraviolet light-emitting diode (UV-LED) with a nanoporous n-AlGaN underlayer was fabricated by top via hole formation followed by high-voltage electrochemical etching. The 20 to 120 nm nanopores were prepared in regular doped n-AlGaN by adjusting the etching voltage. The co