0.18um EEPROM Process Flow Introduction1.ppt

0.18um Floating Gate EEPROM Simple PROCESS FLOW Fully Embedded with SMIC 0.18um Logic Process 1.8v Logic Core + 3.3v/5v MV (Option) + 16v HV + EEPROM Integrate ROM + OTP + EEPROM on one chip Retrograde Twin Well + HVNW + Psub , 2P3M ~ 5M 31 Masks, 31 Masking Steps (2P5M), 10 extra litho for EE