Microstructure and Luminous Properties of Silicon Quantum Dots Embedded in Siric

Name: Microstructure and Luminous Properties of Silicon Quantum Dots Embedded in Siric
Rating: 4.5 (37 reviews)
Author: Mark-42395

上传者：Mark-42395 2020-07-16 11:06:31上传 PDF文件 856KB 热度 37次

磁控共溅射法沉积的氮化硅基硅量子点薄膜的微结构和发光特性，陈小波，杨培志，采用双极脉冲和射频磁控共溅射法在400℃下硅和石英基片上沉积了富硅氮化硅薄膜。然后采用快速光热退火炉在氮气氛中于1050℃退火。�

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Microstructure and Luminous Properties of Silicon Quantum Dots Embedded in Siric

磁控共溅射法沉积的氮化硅基硅量子点薄膜的微结构和发光特性，陈小波，杨培志，采用双极脉冲和射频磁控共溅...

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