Monte Carlo simulation study of quasielastic electron scattering from an overlay

MonteCarlosimulationstudyofquasi-elasticelectronscatteringfromanoverlayer/substratesystem，李永钢，张增明， Recentexperimentalresultshaveshownthattherecoilenergiesofelectronselasticallyscatteredbylightandheavyatomscanberesolvedforanenergeticelectronbeamandat