A Review on Power MOSFET Device Structures

ThepaperpresentsthecomprehensivereviewonthevariousPowerMOSFETstructuresthathavebeendevelopedduringthepastdecade.VariousstructuresofPowerMOSFETlikeLDMOS,VDMOS,V-GrooveMOS,TrenchGateMOS,FLIMOS,SJ-MOS,andStrainedSiMOSarestudiedandissuesrelatedtothe